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The production system Tetra 7500, with its 7500-litrechamber volume and PC control, is used in series production (cleaning, etchingａnd activation).
Special plasma system Tetra 7500-LF-PC
Technical data:
Switch cabinet:
W 3000 mm, H 2000 mm, D 1000 mm
Chamber:
W 1500 mm, D 2000 mm, H 2500 mm
Chamber volume:
approx. 7500 litres
Gas supply:
2 gas channels via MFCs
Generator:
6 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Control
PC control (Windows) with industrial field bus
