Diener Special plasma system Tetra 2400-LF-PC

Diener Special plasma system Tetra 2400-LF-PC

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2023-02-09 20:18:05
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上海尔迪仪器科技有限公司

上海尔迪仪器科技有限公司

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The production system Tetra 2400, with its 2400-litrechamber volume and PC control, is used in series production (cleaning, etchingand activation).

Special plasma system Tetra 2400-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 2200 mm, D 800 mm

Chamber:
1100, D 2500 mm

Chamber volume:
approx. 2400 litres

Gas supply:
3 gas channels via MFCs

Generator:
4 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Parts holding:
Rotary drum (with 16 baskets each with 30 litres volume)

Control
PC control (Windows) with industrial field bus


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