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The production system Tetra 4400, with its 4400-litrechamber volume and PC control, is used in series production (cleaning, etchingａnd activation).
Special plasma system Tetra 4400-LF-PC
Technical data:
Switch cabinet:
W 1800 mm, H 1000 mm, D 800 mm
Chamber:
L 1350 mm, D 1250 mm, H 2600 mm
Chamber volume:
approx. 4400 litres
Gas supply:
3 gas channels via MFCs
Generator:
4 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Control
PC control (Windows) with industrial field bus
Properties:
Oxygen generator
Plasma cleaning source for roots pumps
