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The production system Tetra 7300, with its 7300-litrechamber volume and PC control, is used in series production (cleaning, etchingａnd activation).
Special plasma system Tetra 7300-LF-PC
Technical data:
Switch cabinet:
W 600 mm, H 2100 mm, D 1200 mm
Chamber:
W 1400 mm, H 2100 mm, D 2500 mm
Chamber volume:
approx. 7300 litres
Gas supply:
2 gas channels via MFCs
Generator:
3 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Control
PC control (Windows) with industrial field bus
