HR (0°, 157nm) R = 92 ... 95% 2 x 10 8 – 1 x 10 9 pulses*
HR (45°, 157nm) R = 90 ... 94% (random pol.)
PR (0°, 157nm) R = 50 ± 3 % 2 x 10 8 – 1 x 10 9 pulses*
PR (0°, 157nm) R = 25 ± 2 % 2 x 10 8 – 1 x 10 9 pulses*
Attenuator T = 67 ± 3 % 5 x 10 7 pulses**, no damage
Attenuator T = 33 ± 3 % 1 x 10 8 pulses***, no damage
Beam splitter T = 20 ± 3 % 1 x 10 8 pulses***, no damage
AR (0°, 157nm) 0.3 ... 0.7 %

Protected Al mirrors (optimized for 157 nm):
R=74 … 78%
• Dielectrically enhanced Al mirrors: up to
R=94% at AOI=0°
• For more information on Al mirrors see pages
122–123

Mirrors and separators for the 160nm range and the 133nm range are produced by coating techniques which were developed for F2 laser coatings.