石墨烯纳米CVD系统

 产品简介：
    nanoCVD-8G石墨烯CVD系统是英国MOORFIELD公司与英国曼彻斯特大学“诺贝尔奖”石墨烯团队共同开发的一款专门生长高质量石墨烯的科研CVD系统，该系统采用的“冷壁技术”生长石墨烯，具有生长速度快，石墨烯质量高，耗量少，无污染的优点，有多篇Science 与Nature的文章里都采用了该设备，是制备高质量二维材料石墨烯科研用户的理想选择。

   产品特性：

• 采用全自动“冷壁”技术与*的加热台设计实现高效加热和低反应材料消耗，运行费用低，石墨烯质量高。

• 超紧凑简约的台式设计 （ 外观体积尺寸： 405X415X280mm3, 机台重量 27 公斤）

•装样简单：采用滑竿推拉门与加热台联动组件

•大样片尺寸：20 mm X40 mm

•加热单元：低热载，高加热率，温度1100度，热电偶温度实时监测温度

•三路气体配带流量控制

•内置压缩气体风扇高效冷却散热

•生产时间短：一次完整生长流程时间小于30分钟

• 触摸式液晶触摸屏界面可自设和存储多达30个生长流程，生长条件精确控制，可重复生成制备石墨烯

• 联机数据采集，生长流程全自动控制

• 系统维护便捷方便，压力、气体流量和温度参数连锁确保使用安全

• 基底一般为铜，其它金属与晶圆可选

  实例：

  典型论文：

1, Transparent conductive graphene textile fibers, Neves, A. I. S., et al. Nature Scientific Reports ,2015.

2, Chemical vapor deposited graphene for opto-electronic applications, Passi, V. et al. Journal of Nano Research, 2016.

3, Spectral sensitivity of graphene/silicon heterojunction photodetectors, Riazimehr, S., et al. Solid-State Electronics, 2015.

4, High quality monolayer graphene synthesized by resistive heating cold wall chemical vapor deposition, Bointon, T. H., et al. Advanced Materials, 2015.

5, Versatile polymer-free graphene transfer method and applications, Zhang, G., et al. ACS, Applied Materials and Interfaces ,2007.

6, Selection, characterisation and mapping of complex electrochemical processes at individual single-walled carbon nanotubes: the case of serotonin oxidation, Güell, A. G., et al. Faraday Discussions ,2014.

7, Nanoscale electrocatalysis: Visualizing oxygen reduction at pristine, kinked, and oxidized sites on individual carbon nanotubes, Byers, J. C., et al. Journal of the American Chemical Society ,2014.

8, Mapping nanoscale electrochemistry of individual single-walled carbon nanotubes, Güell, A. G., et al. Nano Letters ,2014.

9, Graphene growth by chemical vapor deposition process on copper foil, Macháč, P., et al. ElectroScope, 2016.

10, Graphene transfer methods for the fabrication of membrane-based NEMS devices, Wagner, S. et al. Microelectronic 

Engineering, 2016.

11, Contact resistance study of various metal electrodes with CVD grapheme, Gahoi, A. et al. Solid-State Electronics, 2016.