SemiQCM™ Sensors for TDMAT Precursor Monitoring
产品简介
详细信息
好处
- Real-Time, in situ process monitoring
- Prevent over-etching, identify chamber clean end point
- Identify equipment or process state fault
功能
- QCM data monitored at 10Hz
- FabGuard correlates QCM data to tool state and process step
- Precise measurement of deposition or etch rates
- Sensitivity & precision for sub-monolayer thickness measurement
典型应用
- Semiconductor Manufacturing
规格
| 类型 | SemiQCM Sensors for TDMAT Precursor Monitoring | |
|---|---|---|
| Maximum Temperature | 200°C | |
| Sensor head Size (Maimum envelope) | 23.87 mm O.D. x 29.19 mm (0.94 in. O.D. x 1.15 in.) | |
| Mounting Feedthrough | KF 40 | |
| Materials | ||
| Body and Holder | 304 stainless steel | |
| Springs | Au plated BeCu | |
| Coaxial Line | 5 mm (1.88 in.) O.D. stainless steel | |
| Other Mechanical Parts | 18-8 or 304 stainless steel, Hasloy® c276 | |
| Insulators | >99% Al2O3 in vacuum: Teflon® used elsewhere | |
| Wire | 1. Ni (in vacuum)2. Ni plated Cu (elsewhere) | |
| Braze | Vacuum process high temperature NiCr alloy | |
| Crystal | 13.97 mm (0.550 in.) diameter | |
零件号
| SemiQCM Sensors for TDMAT Precursor Monitoring | |
|---|---|
| 零件号 | 明细 |
| 750-7000-G5 | SEMI QCM SENSOR ASSY 50MM |
| 750-7000-G6 | Semi QCM Sensor Assy 60mm |
| 750-7000-G7 | Semi QCM Sensor Assy 70mm |
| 750-7000-G8 | Semi QCM Sensor Assy 80mm |
| 750-7000-G9 | Semi QCM Sensor Assy 90mm |
| 750-7000-G10 | Semi QCM Sensor Assy 100mm |
| 750-7000-G11 | Semi QCM Sensor Assy 110mm |
| 750-7000-G12 | Semi QCM Sensor Assy 120mm |
| 750-7000-G13 | Semi QCM Sensor Assy 130mm |
| 750-7000-G14 | Semi QCM Sensor Assy 140mm |
| 750-7000-G15 | Semi QCM Sensor Assy 150mm |
耗材
| SemiQCM Sensors for TDMAT Precursor Monitoring | |
|---|---|
| 零件号 | 明细 |
| 750-7013-G1S | Crystal Holder Assembly Spare |
| 750-1090-G10 | Sensor Crystals, 6MHz, SC Alloy |
备件
| SemiQCM Sensors for TDMAT Precursor Monitoring | |
|---|---|
| 零件号 | 明细 |
| 007-023 | 陶瓷夹持器 |
| 750-171-P1 | 指形弹簧触点 |
| 750-7005-G1S | Crystal Holder and Retainer Spring Spare Assembly |
数据表
其他文件