UHV 可烘烤传感器
产品简介
详细信息
功能
- 高温铜焊和焊接结构
- 烘烤温度高达 450℃
- 晶体闸（选件）
- 前装式晶体支架
- 易于安装
- CF40 馈入装置
- 馈入件不需要铜焊或焊接
- 焊接为客户长度的传感器/馈入装置组合
规格
| 类型 | Bakeable Sensor w/ Shutter | Bakeable Sensor w/out Shutter | |
|---|---|---|---|
| 温度 | 400° C continuous (for bake only; water flow recommended for actual deposition monitoring) | 450°C continuous (for bake only; water flow recommended for actual deposition monitoring) | |
| 传感器头部尺寸（大外壳） | 1.35 in. x 1.38 in. x 1.21 in. high (34 mm x 35 mm x 31 mm high | 1.35 in. x 1.38 in. x 0.94 in. high (34 mm x 35 mm x 24 mm high) | |
| 晶体交换 | Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange. | Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. | |
| 安装 | a) Standard—four #4-40 tapped holes on the back of the body b) Optional—right angle bracket; IPN 007-108 | Four #4-40 tapped holes on the back of the body | |
| 馈入件 | 2¾ in. ConFlat®, integral with sensor head Water, air and coax tubes are semi-rigid, but easily formed (2.0 in. [50.8 mm] minimum bend radius) | 2¾ in. ConFlat, integral with sensor head Water and coax tubes are semi-rigid, but easily formed. (2.0 in. [50.8 mm] minimum bend radius) | |
| 实用工具 | 1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.) 2) Filtered, oil-free air, regulated at 80 PSIG (5.5 bar) [552 kPa] 3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required | Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.) | |
| 材料 | |||
| 主体和支架 | 304 type stainless steel | 304 type stainless steel | |
| 弹簧 | Molybdenum and Inconel X-750 | Molybdenum and Inconel X-750 | |
| 水、空气和同轴管线 | 0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax | ||
| 其他机械部件 | 18-8 or 304 stainless | 18-8 or 304 stainless | |
| 绝缘体 | >99% Al2O3 in vacuum; other high density ceramics used elsewhere | >99% Al2O3 in vacuum; other high density ceramics used elsewhere | |
| 电线 | 1) Ni (in vacuum) 2) Ni plated Cu (elsewhere) | 1) Ni (in vacuum) 2) Ni plated Cu (elsewhere) | |
| 铜焊 | Vacuum process high temperature Ni-Cr alloy | Vacuum process high temperature Ni-Cr alloy | |
| 晶体 | 0.550 in. (13.97 mm) diameter | 0.550 in. (13.97 mm) diameter | |
附件
| 零件号 | 明细 |
|---|---|
| 750-420-G1 | 电磁阀，24 伏（与带闸门和多晶体传感器配合使用） |
耗材
| 名称 | 说明 |
|---|---|
| 石英监控器晶体 |
备件
| 零件号 | 明细 |
|---|---|
| 007-007 | 止动弹簧（用于晶体支架） |
| 007-064 | 陶瓷夹持器 |
| 007-094 | Clamping Sring, UHV Bakeable Sensor |
| 007-095 | Handle, UHV Bakeable Sensor |
| 007-098 | 母型连接器（包括套圈和螺母） |
| 007-099 | 可烘烤头部触点 |
| 007-100 | High Temperature BNC Insulator |
| 007-103 | Insulator, UHV Bakeable Sensor |
| 007-104 | High Temperature BNC Body, Bakeable |
| 007-147 | Vented Screw, 4-40 x 3/8 in. |
| 007-155 | BRAZE ASM 12 IN. 206-804-G1 |
| 007-156 | BRAZE ASM 20 IN 206-804-G2 |
| 007-157 | BRAZE ASM 30 IN 206-804-G3 |
| 007-228 | SPEC,4-40 X 5/8 VENTED SHC SC |
| 007-267-P2 | Spreader Bar, UHV Bakeable Sensor |
| 007-268-P1 | Shoulder Washer, UHV Bakeable Sensor |
| 007-269-P1 | Shoulder Washer, UHV Bakeable Sensor |
| 008-007 | CRYSTAL SNATCHER |
| 059-0084 | Gasket, Copper, Bakeable Sensor Actuator |
| 070-201 | #4 开口紧锁垫圈 |
| 084-069-P1 | SCREW 4-40 x .187 LG PHIL FLAT HD SS |
| 750-018-P3 | SPLIT CLAMP {THD} {CLEAN} @ |
| 750-018-P5 | SPLIT CLAMP {CLEAN} @ |
| 750-022-G5 | ACTR/AIR LINE 12 IN {CLEAN} |
| 750-022-G6 | ACTR/AIR LINE 20 IN {CLEAN} |
| 750-022-G7 | Actuator/Air Line 76.2 cm (30 in.),Clean |
| 750-028-G5 | BK XTAL SNS/FT/AIR 12 IN CLEAN |
| 750-028-G6 | BK XTAL SNS/FT/AIR 20 IN CLEAN |
| 750-028-G7 | BK XTAL SNS/FT/AIR 30 IN CLEAN |
| 750-115-P4 | 联轴器（安装到波纹管组件） |
| 750-118-P4 | ACT SUPPORT W/ DOWEL |
| 750-120-G3 | ASSY,SHAFT |
| 750-216-G1 | 闸门组件（闸门模块的组成部分） |
| 750-218-G1 | Crystal Holder, Bakeable Sensor |
数据表
手册
目录
三维步骤文件