Crystal 12 传感器
产品简介
详细信息
功能
- 装有 12 颗晶体，可进行可靠的自动转换，从而大限度延长过程运行时间
- 易于拆卸的旋转传送带允许快速更换所有 12 颗晶体
- 晶体转换由空气驱动完成（竞争产品是使用生热电机），因而晶体温度非常稳定
- 易于拆卸的前沉积罩保护晶体和旋转传送带上不会积存材料，从而大限度减少拆卸整个传感器以进行维护的必要性
- 可选安装后套件允许用户根据公制硬件大小自行修改
规格
| 类型 | Crystal 12 Sensor | |
|---|---|---|
| 无水时的烘烤温度 | 130°C | |
| 小水流时的工作等温环境温度 | 300° C | |
| 尺寸（大外壳） | 4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed | |
| 水管和空气管长度 | Standard 30 in. (762 mm) | |
| 晶体交换 | Front-loading | |
| 安装 | Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (IPN 750-670-G1). | |
| 重量 | 4.92 lb. (2.23 kg) | |
| 安装要求 | ||
| 馈入件 | Qty (1) 2-3/4 in. ConFlat® with one coaxial feedthrough, two pass water, one air, IPN 750-685-G1, or, Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings or, Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-G1 | |
| 安装 | User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, IPN 750-670-G1, may be purchased for this purpose. | |
| 空气和水连接 | User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with Crystal12 accessory kit.) | |
| 实用工具 | Minimum water flow 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa - 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve. | |
| 材料 | ||
| 板、材料罩、机械部件、主体和圆盘 | 304 type stainless steel | |
| 弹簧、电气触点 | Au plated Be-Cu, Au Plated 302 stainless steel | |
| 水管和空气管 | S-304, 0.125 in. (3.2 mm) O.D. x .016 in. (0.4 mm) Wall Thickness x 30 in. Long (762 mm) seamless stainless steel tubing | |
| 连接器 | Stainless steel | |
| 绝缘体 | Teflon, Peek® | |
| 电缆 | Teflon insulated copper plated steel | |
| 晶体 | 0.550 in. (13.97 mm) diameter | |
| 1 in. 螺栓和 Ultra-Torr（压缩接头）端接： | ||
| 材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON® | |
| 温度 | Operational environment to 300° C with water cooling or 165° C without | |
| 安装 | 1.015 in. ±0.010 in. diameter aperture | |
| CF 40 焊接式端接： | ||
| 材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel | |
| 温度 | Operational environment to 450° C with water cooling or 165° C without | |
| 安装 | Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min. | |
附件
| 名称 | 说明 |
|---|---|
| QCM 传感器馈入件 |
| Crystal 12 Sensor | |
|---|---|
| 零件号 | 明细 |
| 750-420-G1 | 电磁阀，24 伏（与带闸门和多晶体传感器配合使用） |
耗材
| 名称 | 说明 |
|---|---|
| 石英监控器晶体 |
备件
| Crystal 12 Sensor | |
|---|---|
| 零件号 | 明细 |
| 750-276-P3 | XTAL12 ACTUATOR COVER PASSIVATED |
| 750-644-G1 | CAROUSEL HOUSING WELDMENT |
| 750-658-G1 | Deposition Shield Assembly, Crystal 12 |
| 750-286-P2 | Pneumatic Actuator,CrystalSix/Crystal 12 |
| 750-291-P1 | Detent, CrystalSix/Crystal 12 |
| 750-294-P2 | Stop Ratchet, CrystalSix/Crystal 12 |
| 750-293-P2 | Ratchet, CrystalSix/Crystal 12 |
| 750-256-P2 | Extension Spring |
| 750-252-P2 | DET,SPRING POST |
| 750-649-G1 | Electrical Connection, Crystal 12 |
| 750-295-G1 | Pawl/Actuator Stem, Crystal 12 Sensor |
| 750-258-P2 | DET - Bearing Shaft |
| 070-0779 | Ball Bearing, CrystalSix |
| 750-652-G1 | Crystal Carousel, Crystal 12 Sensor |
| 750-650-P1 | RESISTOR NETWORK APERTURE PLATE |
| 070-1253 | Dowel Pin, CrystalSix |
| 750-651-P1 | RESISTOR NETWORK SUPPORT |
| 750-655-P1 | RESISTOR NETWORK INSULATOR |
| 750-642-G1 | Resistor Network Grid Weldment |
| 750-661-P1 | Contact Terminal, Crystal 12 |
| 750-656-P1 | CRYSTAL INSULATOR |
| 321-038-P6 | Leaf Spring, Crystal 12 |
| 750-657-P1 | Leaf Spring, Grounding, Crystal 12 |
| 750-671-P1 | Torsion Spring, Crystal 12 |
| 750-626-P1 | Spring, Crystal 12 and Sputtering Sensor |
| 750-647-P1 | Carousel Spindle Body, Crystal 12 |
| 070-1268 | Bearing, CrystalSix |
| 070-1254 | E-RING BOWED #HSTBtruarc |
| 750-660-P1 | pdcation Screw, 6-32, Crystal 12 |
| 007-126 | DET-30"STN STL SEAMLESS TUBING |
| 070-201 | #4 开口紧锁垫圈 |
| 084-004 | #4-40 X 0.187 内六角头螺钉 |
| 070-398 | 5103-12H,EXT CRESCENT RET RING |
| 070-0867 | B4-10,1/8"SHAFT SPACER .094TH |
| 070-170 | #2 SPLIT LOCKWASHER SS |
| 070-177 | #4-40 X 3.12 六角头螺钉 |
| 080-038 | SCREW 0-80 x .375 LG PHIL PAN HD SS |
| 082-032 | Lock Washer, #2, Stainless Steel |
| 082-045 | #2-56 x 0.187 十字槽螺钉 |
| 084-054 | 开牙锁定垫片4号 |
| 082-022 | Washer, #2, Flat, Stainless Steel |
| 082-024 | Screw, Socket Head, 2-56 x 0.250 in. |
| 750-292-P2 | Detent Spacer, CrystalSix/Crystal 12 |
| 080-013 | 开*片#0 |
| 080-007-P1 | Flat Washer, Stainless Steel |
| 080-009-P1 | #0-80 X 0.188 凹头螺钉 |
| 084-048 | SCREW 4-40 x .250 LG PHIL FLAT HD SS |
| 750-665-P1 | Shoulder Screw, 2-56, Torsion Spring |
| 084-093 | Screw, Socket Head, 4-40 x 1.125 in. |
| 086-084-P2 | #6-21 x 1/8 固定螺钉 |
| 086-041 | #6 平垫圈 |
| 086-038 | #6 开口紧锁垫圈 |
| 086-036 | #6-32 x 3/8 凹头螺钉 |
| In-vacuum cables | |
| 321-039-G12 | 真空电缆，15.2 厘米（6 英寸） |
| 007-252 | 真空电缆，30.5 厘米（12 英寸） |
| 321-039-G11 | 真空电缆，61.0 厘米（24 英寸） |
| 007-044 | 真空电缆，78.1 厘米（30.75 英寸） |
| 007-059 | 真空电缆，91.4 厘米（36 英寸） |
| 007-061 | 真空电缆，121.9 厘米（48 英寸）- 需要 ModeLock 控制器 |
| 321-039-G13 | 真空电缆，154.2 厘米（60 英寸）- 需要 ModeLock 控制器 |
| 321-039-G14 | 真空电缆，182.9 厘米（72 英寸）- 需要 ModeLock 控制器 |
| 321-039-G15 | 真空电缆，3.5 米（137.8 英寸）- 需要 ModeLock 控制器和4 米 XIU |
| 321-039-G16 | 真空电缆，4 米（157.5 英寸）- 需要 ModeLock 控制器和4 米 XIU |
数据表
手册
手册
目录
三维步骤文件