校准标样_-八帆仪器设备（上海）有限公司手机版

详细介绍

Applied Nanotools为分辨率应用提供X射线，EUV和可见光显微镜的校准标准。这些高质量的光学元件包括各种校准元件，可在以下SEM图像中看到：

ANT校准标准设计用于具有纳米级特征的X射线成像系统的分辨率要求。适用于软X射线和硬X射线机制以及光学设置。

嵌套的Ls或弯头允许高分辨率测量，保证间距和效率。在高分辨率标准下低至15 nm半间距。

该图案允许校准和准确比较X射线与其他成像方法的光学分辨率。

Applied Nanotool的定制设计NanoUSAF 1951基于USAF 1951设计，但具有纳米而非微米的特征

Device	Base Price
Ultra-High Resolution Soft X-Ray Calibration Standard (70 nm Au) (15 nm half pitch)	USD $5000
Soft X-Ray Calibration Standard (200 nm Au) (20 nm half pitch or better)	USD $4500
Hard X-Ray Calibration Standard (>600 nm Au) (25 nm half-pitch or better)	USD $6000
Features Include: • Nested L’s • Siemen star patterns (large and small) • Varying pitch gratings and meshe • Nano USAF 1951
Customization	Extra Fee
• Custom Logo (Max 50 µm ² area)	$1000
• Low stress 50 nm silicon nitride membrane	$2000
• Low stress 100 nm silicon carbide membrane	$2500
• Fused Silica Substrate (~500 um thick) Chrome metal on glass (positive tone-only)	$2500
Negative polarity (features transparent) • 30 nm minimum feature size (soft X-ray) • 50 nm minimum feature size (hard X-ray)	$1250
• Custom chip sizes	Contact us